Photovoltaic/Solar Metrology System
For in-process monitoring of solar/photovoltaic wafers
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
- Up to three thickness channels per rack
- Proprietary MTII push/pull capacitance probes work with all wafer types
- Minimum, maximum, average and total thickness variation measurements
- Bow measurement (3 probe pairs required)
- Integrated data aquisition and control electronics
- Fast Ethernet communications ports for production rates up to 5 wafers per second
- Scalable for increased number of thickness line scans
- Digital I/O for interface with existing wafer handling equipment
- Windows® based control program for local or remote data monitoring
- Windows® based DLL package for integration with existing control PC’s
- Standard and custom probe sizes available
| Product Info | Technical Specifications | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| P/N | Model | Measurement Range | Stand-Off | Interface | Type | Request Info | ||||||
| 8000-4316-001 | PV-1000 Thickness System -1 | Select PP Probes | Select PP Probes | Ethernet | up to 6 Channel Rack | Request Infomation on PV-1000 Thickness System -1 | ||||||
| 8000-4316-002 | PV-1000 Thickness System -2 | Select PP Probes | Select PP Probes | Ethernet | up to 6 Channel Rack | Request Infomation on PV-1000 Thickness System -2 | ||||||
| 8000-4316-003 | PV-1000 Thickness System -3 | Select PP Probes | Select PP Probes | Ethernet | up to 6 Channel Rack | Request Infomation on PV-1000 Thickness System -3 | ||||||
| Not finding what you’re looking for? MTI offers custom solutions More Info About MTI’s Custom Solutions | ||||||||||||
| Industry | Measurement Type | Applications |
|---|---|---|
| Solar | Metrology | Wafer Bow and Warp |
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
Required Accessories
MTI offers probes for grounded targets using single-ended probes and for ungrounded or poorly grounded targets using push/pull probes. Single-ended Probes for Grounded Targets Provide Stable and Precise Non-Contact…
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